Abstract: Wafer fabrication is a critical process in semiconductor manufacturing. Cluster tools with Equipment Front-End Module (EFEM) are widely used in wafer fabrication. These tools consist of a ...
Backs up the inbound provisioning mapping to a file. This can be restored to the same service principal or another service principal by using the Restore cmdlet. Backs up the inbound provisioning ...
Through PowerShell Script modules (.psm1) which use the core framework Cmdlets. Interactive login using Username and Password. For terminal-only clients provide the parameter UseDeviceCode the login ...
Abstract: Multi-cluster tools are widely utilized in wafer fabrications. It is of great significance to schedule such tools optimally to improve productivity and ensure wafer quality. However, ...
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