Atomic layer deposition (ALD) used to be considered too slow to be of practical use in semiconductor manufacturing, but it has emerged as a critical tool for both transistor and interconnect ...

Authors: Shunsuke Abe, Hideo Hara, Shin Masuda, and Hirohito Yamada. This paper describes a simple fabrication process of verticaltaper structures which can locally tune the thickness of silicon ...

Computer engineering is a broad field that sits in between the hardware of electrical engineering and the software of computer science. When computer engineers design hardware, they focus on what the ...

In a groundbreaking study published in Nature Nanotechnology, a team of researchers from Tufts University has unveiled a novel nanomanufacturing method that utilizes water as the primary solvent. This ...